| 摘要 |
PURPOSE:To equalize the time required for filling up a closed pipe with the vapor containing diffusing material as well as to contrive reproducibility of diffusion by a method wherein the shape and the size of the material of diffusion source are made uniform. CONSTITUTION:When the speed and the temperature of diffusion is fixed, the absolute quantity of the material, per unit time, vaporized from the surface of a solid body or liquid is in proportion to the surface area of the solid body or liquid. Also, when the total weight of the material is fixed and unchanged, there exists reciprocal relations between the total surface area and the average particle diameter. Utilizing the above, the diffusing material is classified using a sieve, the particle size is made uniform, and a closed-pipe type diffusion is performed, thereby enabling to improve reproducibility remarkably. |
