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发明名称
摘要
申请公布号
JPS5829616(B2)
申请公布日期
1983.06.23
申请号
JP19760064106
申请日期
1976.06.03
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KIRITA KEI;TSUJI YASUTAKA;MORYA TAKAHIKO
分类号
H01L21/336;H01L21/225;H01L29/78
主分类号
H01L21/336
代理机构
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