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经营范围
发明名称
Method for sputtering niobium or tantalum thin films
摘要
申请公布号
US3271285(A)
申请公布日期
1966.09.06
申请号
US19630316917
申请日期
1963.10.17
申请人
GENERAL ELECTRIC COMPANY
发明人
SKODA RAYMOND E.
分类号
C23C14/18;C23C14/34
主分类号
C23C14/18
代理机构
代理人
主权项
地址
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