| 摘要 |
PURPOSE:To realize a multi-function sensor which is capable of measuring infrared ray, moisture and temperature, by supporting an electrical insulating thin film with a substrate, providing a gas sensible film, electrical characteristic measuring electrode and a heater for locally heating said sensible film at a part of said thin film and by providing a photo-absorbing film and a temperature sensor for detecting temperature generated therein to the other part thereof. CONSTITUTION:The apertures 11 and 12 which are widened toward the lower end are bored to an Si substrate 1, an SiO2 film 10 providing Si chips 2 and 2' at the lower surface is deposited to the surface of the substrate 1 remaining in the periphery of said apertures, and these chips 2 and 2' are hanged within the apertures 11 and 12. Here, the chips 2 and 2' are patterned including the cut- away part. Corresponding to these chips, a gas sensible film 5, electrodes 6 and 7 for measuring electrical characteristics, electrodes 8 and 9 providing through holes as the windows 8' and 9' and a photo absorbing film 16 are formed on the film 10. Thereby, the chips 2 and 2' are also used as the heater for heating the film 5 and a sensor assuring a fantastically high thermal response rate can be obtained. |
