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发明名称
VERFAHREN ZUR RUECKSEITENGETTERNDEN OBERFLAECHENBEHANDLUNG VON HALBLEITERSCHEIBEN
摘要
申请公布号
DE3148957(A1)
申请公布日期
1983.06.23
申请号
DE19813148957
申请日期
1981.12.10
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH
发明人
BUCHNER,ALFRED;DR.DIPL.-PHYS. KUHNENFELD,FRANZ KUHN;ING. AUER,WALTER
分类号
H01L21/304;H01L21/322;(IPC1-7):H01L21/30;H01L21/46;C30B33/00;B24D3/00;B28D5/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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