| 摘要 |
PURPOSE:To detect NO2 gas with the highest sensitivity and at the highest response speed by a method wherein an NO2 gas detector provided with a sensitive body having a specified particle size is made to operate at a specific temperature, in an NO2 gas detector wherein a tin oxide film is used as a sensitive body. CONSTITUTION:Electroconductive paste formed of platinum in the main is applied on one surface of an alumina substrate 3 and baked so as to form a plane- shaped heater 4, while electroconductive paste formed of platinum in the main is printed and baked on the other surface of the alumina substrate 3 to form an electrode 2. A thermocouple 8 for measuring the temperature of a gas-sensitive body, which is formed of CA wires, is baked and fixed together with the electrode 2. A tin oxide film having a crystal particle size of 100Angstrom or less and constituting an NO2 gas-sensitive body 1 is obtained by baking, in air, a thin film of tin oxide which is obtained by sputtering metal tin having the purity of 99.99% and used as a target material. Suitable operation temperature is 200- 300 deg.C. |
