发明名称 DUST REMOVER FOR ORIGINAL PLATE IN LITHOGRAPHIC PRINTER
摘要 PURPOSE:To eliminate the defects of patterns, by providing mechanisms for inspecting original plates for presence or absence of dust and sizes thereof in places where the plates are printed and removing the dust present on the plates. CONSTITUTION:The bottom surface of an original plate 6 is swept over the entire surface thereof by moving mechanisms 28, 29 which move the locus of the light 2 from a laser device 1 mounted to a frame 5 in X-Y directions. The reflection that arises when the laser light shines on foreign matters and dust is detected with a photodetector 3, and the position thereof is stored. A vacuum suction port 7 is moved to said position and the foreign matters or dust are removed by vacuum. If dust sticks on the original plate by static electricity, a corona discharger 15 is used. More specifically, high voltage is applied to the destaticizing bar of the corona discharger and corona is discharged from the tip of the stylus to ionize the air around the stylus and to neutralize the electrostatic charge of dust 29 and the electrostatic charge of the original plate 6, whereby the dust 29 is easily removed.
申请公布号 JPS58105152(A) 申请公布日期 1983.06.22
申请号 JP19810204060 申请日期 1981.12.17
申请人 TERUMETSUKU:KK 发明人 SUGIE KAZUO
分类号 H01L21/30;G03F1/00;G03F7/20;H01L21/027 主分类号 H01L21/30
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