摘要 |
PURPOSE:To enable the measurement of spectroscopic value of soft X ray while miniaturizing the equipment used regardless of X ray radiated in a pulse and continuously by determining the wave length and intensity of X ray below 43Angstrom in the wave length range based on the measurement of the kinetic energy and quantity of photoelectrons released when X ray to be measured irradiates hydrocarbon. CONSTITUTION:In a film 2 such as polyethylene, photoelectrons are generated from carbon atoms composing it under the irradiation of X ray 1, moves to the surface of the film and released into vacuum from the surface thereof. The kinetic energy Ek of the photoelectrons give various values according to various energies, which the X ray contains. The photoelectrons 3 are introduced to a kinetic energy discriminator 4 to measure the kinetic energy along with the current thereof, which provides a spectrum with the kinetic energy corresponding to the wavelength of the X ray and the flow of the photoelectrons corresponding to the intensity thereof. When the energy of the X ray is hnu<284.6eV, the photoelectrons attenuate extremely in the wavelength range exceeding 43.5Angstrom . |