| 摘要 |
PURPOSE:To obtain a multifunctional sensor with low electric power consumption and high accuracy by forming an electrically insulating thin film on a substrate, and providing plural gas sensitive films, electrodes for measuring electrical characteristics of the gas sensitive films and heaters for heating the gas sensitive films thereon. CONSTITUTION:An SiO2 film (electrically insulating film) 7 is formed on a p type silicon substrate 1, and plural gas sensitive films 5', 5'', 5''' having the same electrical characteristics or having electrical characteristics differing partly from those of others are provided on the film 7. Electrodes 6', 6'' for measuring electrical characteristics are connected to said films respectively, and heaters 2', 2'', 2''' for heating constituted of silicon thin layers provided in accordance with the films 5'-5''' through the holes 8', 8'' opened in the film 7 are connected to electrodes 3', 3'' for heating. The heaters 2'-2''' may serve also as temp. sensors. Since the film 7 has high electric resistance and low heat conductivity, the heaters 2'-2''' are heated respectively different temps. and are used for detection of respectively different gases, thus multifunctions are obtained with one sensor. The sensor of a miniature size and high response speeds is obtained. |
