| 摘要 |
PURPOSE:To detect the position of a pattern with a high visibility even if the surface of a chip is inclined, by adding a circuit, which detects the output peak of an image pickup part, to a preprocessing circuit and controlling the irradiation direction of an illumination optical system on a basis of the detection result. CONSTITUTION:The image of a pattern of a chip 1a on an object 1 to be recognized 1 is picked up by an image pickup part 3, and the signal is made binary by a pre-processing circuit 4, and it is detected by a peak level detecting circuit 5 whether the peak of the output is higher than a prescribed level or not. On a basis of the detection result, a recognizing circuit 6 discriminates whether the surface of the chip is inclined or not and discriminates the direction where the surface of the chip is inclined if it is inclined. When the inclination of the surface of the chip is discrominated, the irradiation direction of an illumination optical system of the image pickup part 3 is corrected through a controlling circuit 7 to make the reflected light from the surface of the chip incident most to a TV camera. |
