| 摘要 |
PURPOSE:To improve operationability and efficiently mount or remove silicon wafers by setting a sputter pallet to a jig support and simultaneously pushing upward the plurality of rivets holding silicon wafer with the rivet pushing pins implanted on the jig support in view of forming clearance. CONSTITUTION:A silicon wafer 2 can be removed from the pallet 1 by the following steps. A sputter pallet 1 mounting a silicon wafer 2 is set to a jig support 10 through the support of blocks 13, 13, a silicon wafer 2 is released by simultaneously pushing upward the rivets 5 holding a silicon wafer 2 with the rivet pushing pins 14, the sputter pallet 1 is pulled out of the blocks 13, 13 in the same way after removing the silicon wafer 2 from the pallet 1, thus completing removal of silicon wafer 2. |
