| 摘要 |
PURPOSE:To obtain a probe card which does not cause a crosstalk by forming a conductive film of ground potential through an insulating film on the outer periphery of a probe stylus. CONSTITUTION:A probe stylus 4 is fixed at the upper end onto an auxiliary card 6 which has a circular window at the center. A card 6 holds partly a conductor layer 9 between insulating plates 7 and 8, has conductor layer 10, 11 on the upper and lower surfaces, and are connected to each other via conductors 12 in the through holes of the plates 7, 8. The stylus 4 is covered at the periphery of a fine conductor core 13 with an insulating film 14 and a conductive film 15, the upper end of the core 13 is inserted fixedly into the hole of the card 6. The film 13 is grounded together with the film 11 on the lower surface of the card 6. The card 6 is mounted via a spacer 16 on the lower surface of an insulating card 5, and the lower end of a conductive pin 17 which is connected to wirings is elastically contacted with the upper end of the core 13 of the stylus 4. In this configuration, the stylus 4 is electrically shielding, and even if the styluses approach to each other, no crosstalk occurs, thereby performing the measurement of an ultrafine circuit in the state of a wafer without error. |
