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发明名称
PLASMA UNIT
摘要
申请公布号
JPS58100392(A)
申请公布日期
1983.06.15
申请号
JP19810196739
申请日期
1981.12.09
申请人
TOKYO SHIBAURA DENKI KK
发明人
KAGEYAMA KATSUHIRO
分类号
H05H1/16;G21B1/00;H05H1/18
主分类号
H05H1/16
代理机构
代理人
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地址
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