METHOD OF FORMING FERROMAGNETIC FILM

摘要

PURPOSE:To remove magnetic anistropy and to obtain excellent magnetic characteristics by a method wherein a ferromagnetic film is produced in the rotating magnetic field through evaporation or sputtering. CONSTITUTION:A magnet 5 mounted to a yoke 4 directly coupled to a rotary shaft is rotated round a substrate holder 2 to apply the rotating magnetic field in parallel to the plane surface of a substrate 1. At the time of sputtering, after evacuating the interior of a vacuum container to 3X10<-7> Torr, As gas is introduced from an inlet port 6 to reach 2X10<-2> Torr. Pre-sputtering is first made for 30min and then main sputtering is performed on the glass substrate. The sputter film thus attained had a thickness of about 15mum.