发明名称 |
Intelligent probe for fast microcircuit internal node testing. |
摘要 |
<p>Internal nodes of an integrated circuit chip are tested by applying a thinly focused electron beam to the node under control of a computer and then sensing secondary electron emission. The computer controls the application of test signals to the peripheral pad connections on the chip and intelligently selects a small number of nodes for testing which are the likeliest nodes to indicate circuit failure.</p> |
申请公布号 |
EP0081295(A1) |
申请公布日期 |
1983.06.15 |
申请号 |
EP19820305943 |
申请日期 |
1982.11.08 |
申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
WOLF, EDWARD D.;OZDEMIR, FAIK SINASI |
分类号 |
G01R31/26;G01R31/302;G01R31/305;H01L21/66;(IPC1-7):01R31/28 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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