| 摘要 |
PURPOSE:To perform a reliable sealing by a method wherein a cap is formed by a shape memory alloy, the cap is coupled to the substrate which is provided in the container to be sealed in the low temperature zone, and the substrate is tightened and sealed in the high temperature zone. CONSTITUTION:The cap 10 of shape memory alloy is formed in the shape wherein the pipe 2 will be tightened in base phase, a martensitic transformation is generated at a low temperature, and the diameter of the cap is widened so that it comes into the pipe with a sufficient margin. The cap 10 is covered on the pipe 2 at a low temperature and placed in a vacuum container 5, and the temperature is raised when the container is completely vacuumed. The cap 10 returns to the original shape phase, the pipe 2 is tightened, and a vacuum sealing is performed. |
