| 摘要 |
PURPOSE:To obtain a gas sensing element having a sufficiently high mechanical strength as well as high gas-sensitive characteristics, by providing a metal oxide layer obtained by means of thermal decomposition of an organometallic compound between a gas-sensitive body and an insulating substrate. CONSTITUTION:An insulative substrate 4 has a heating thick film heater 7 provided on one side thereof and Au electrodes 2, 3 provided on the other side by thick-film printing. Between these Au electrodes, a liquid obtained by diluting aluminum hexoate as an organometallic compound with propyl alcohol is applied and dried. Then, the surface of the organometallic compound film 10, between the electrodes 2, 3, is printed with a paste obtained by adding PdO to SnO2 powder having Sb2O3 added thereto and dispersing the same with an organic solvent, by a screen printer. This paste is dried and then baked to form a gas sensing element. As th above-mentioned organometallic compound, such a compound is employed as represented by the general formula: (Me)n(OR)m (wherein Me represents a metallic element, and R represents nitrogen, carbon, hydrogen or oxygen group). |
