Method of repairing surface defects in coated laser mirrors

摘要

A method of repairing an intermediate amorphous silicon and/or germanium bond coat on a laser mirror substrate is described. The initial coating is put down by polishing the mirror substrate followed by depositing a layer of amorphous silicon, amorphous germanium, or mixtures thereof on the mirror surface, and polishing the thus coated mirror surface to a substantially void-free surface finish. A layer of oxide of silicon or germanium is deposited on the thus formed coating either during, after, or in sandwich fashion during the formation of such intermediate bond coat. The intermediate coating can be surface polished back to the original amorphous layer or the oxide can remain on the surface after polishing.