| 摘要 |
PURPOSE:To improve the yield and performance of a solar battery by employing at least as one electrode aluminum containing silicon. CONSTITUTION:In a thin film solar battery using an amorphous silicon thin film, an aluminum film containing silicon is used for at least one electrode. In the manufacture of aluminum electrodes containing silicon, it can be readily manufactured by sputtering using a target made of aluminum, silicon alloy of suitable composition. Further, the thermal deposition of the resistance and the deposition of the electron beam can be facilitated. In this manner, the surface can be very smoothened, photoelectric performance of the solar battery and the yield can be improved. |
