| 摘要 |
PURPOSE:To imporve the measurement precision of a film thickness gauge by bringing a film for measurement into close contact with a capacitor electrode part. CONSTITUTION:An insulator 3 holds counter electrodes 2a and 2b, and thus a capacitor is formed. In the insulator 3, through holes 4 are formed. For example, negative pressure is introduced through those through holes 4 to suck a film 1, which are brought into close contact with the capacitor electrode parts 2a and 2b. In said state, variations in electrostatic capacity of the capacity electrode parts 2a and 2b are utilized to measure the thickness of the film 1. |
