| 摘要 |
PURPOSE:To push out substrates from a carrier having a narrow opening by a method wherein the linear part of an arm of T-shaped flat plate is made to perform circumferential motion around a rotating shaft perpendicularly to the face of a stage. CONSTITUTION:The rotating shaft 2 is fixed to the stage to mount the carrier 4 through bearings 3, and the arm 1 is fixed to the rotating shaft 2. When the rotating shaft 2 is rotated in the direction A, the tip 1a of the arm 1 draws a locus of the radius R, and the semiconductor substrates 6 in the carrier 4 are pushed out as far as the distance D. Length 1b of the arm tip 1a is smaller than size 4b between the upper and the lower inside faces of the carrier 4, and the substrates of the plural number are totally pushed out. By this constitution, the substrates can be pushed out onto transferring parts 5 easily from the carrier having the small opening 4a. |
