| 摘要 |
PURPOSE:To enable to perform an easy and precise positioning through irradiation of a photoelectric surface with laser beam, by a method wherein laser beam, enlarged by a lens system, is projected to a photoelectric surface of a collector, and the photoelectric surface of the collector is verified by revolving a laser oscillator laterally and vertically. CONSTITUTION:Beams 5', enlarged by a beam enlarging device 8 mounted to the front of a laser oscillator 6, easily catches a photoelectric surface 7' of a collector 7. If, in order to verify where the photoelectric surface 7' is present in the enlarged beam 5' shown in oblique lines, the laser oscillator moves laterally, the photoelectric surface 7' indicates as a differential voltage a wide change in output, and thereby current positions 5'-1 and 5'-2 of the beam 5' are caught to measure X-coordinates X1 and X2 representing a current center position. Likely, with the laser oscillator moved vertically, Y-coordinates Y1 and Y2 are measured. The movement of the center of the enlarged beam 5' to the positions of the coordinates X and Y in the position of the photoelectric surface 7' permits the approximate coincidence of the center of the beam 5' with the center of the photoelectric surface 7' of the collector 7. |
