| 摘要 |
PURPOSE:To enable the analyzing of different areas in a sample simultaneously and accurately, by making modulation voltages the same in a plurality of areas of the sample to apply different DC bias voltages to the respective areas overrapping the modulation voltage. CONSTITUTION:When a sample 4 is a conductor, a high resistance 13 is inserted between the sample 4 and the earth to avoid a short-circuiting of a modulation voltage 10 with the earth. When a primary electron beams is made incident into the sample 4 from an irradiation system 3, a secondary electron alone released from the sample is modulated with the DC voltage 10. Only a signal of frequency component synchronizing the DC voltage 10 applied to the sample 4 is detected and amplified with a lock-in amplifier 7 to detect a signal alone of the secondary electron from the sample 4 modulated. Here, as no signal due to stray electron is detected, auger electron spectroscopic spectrum in a low energy area has very limited noise. The primary electron beam incident into the sample 4 fails to be detected with the amplifier 7 if the diameter thereof exceeds the smallest area.
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