| 摘要 |
PURPOSE:To prevent the transverse vibration of a pulling up shaft effectively in a pulling up machine for a semiconductor by the Czochralski method using the pulling up shaft consisting of a flexible material, by means of a specific moving bed. CONSTITUTION:A shaft 28 having a pulling up wire 1 attached therto and a seed 29 mounted to the bottom thereof is attached to a rotating shaft 27 rotatably mounted to a moving bed 21 through bearings 26, and the moving bed 21 is movable vertically along guide shafts 20 through guide rollers 22. A balancing weight 25 is attached to the moving bed 21 through a rope 24 and a pulley 23. The wire 1 is pullled up by a hoisting apparatus 12 while rotated, and a single crystal ingot 2 is grown from a raw material melt in a crucible 11. In the process, the moving bed 21 is guided by the guide shafts 20 to prevent the vibration of the respective members ranging from the wire 1 to the single crystal ingot 2 with certainty. |
