发明名称 PHOTOCONDUCTIVE MEMBER
摘要 PURPOSE:To improve the durability of an amorphous layer by a method wherein a photoconductive amorphous layer is made of a layer comprising nitrogen atoms distributed unevenly and continuously in the layer thickness direction and another layer comprising the group III atoms distributed unevenly and continuously in the same direction. CONSTITUTION:A photoconductive member 100 is provided with a silicon amorphous layer 102 containing at least one of either hydrogen atoms or halogen atoms. The amorphous layer 102 comprises the first layer region 103 containing the nitrogen atoms, the second layer region 104 containing the nitrogen atoms and atoms belonging to the group III of the periodic table and the surface layer region 106 not containing the nitrogen atoms nor the atoms belonging to said group III on said layer 104. The nitrogen atoms are distributed unevenly and continuously over the layer region 103 in the layer thickness direction while the group III atoms are distributed unevenly and continuously in the same direction.
申请公布号 JPS5893385(A) 申请公布日期 1983.06.03
申请号 JP19810193201 申请日期 1981.11.30
申请人 CANON KK 发明人 OGAWA KIYOUSUKE;SHIRAI SHIGERU;KANBE JIYUNICHIROU;SAITOU KEISHI;OOSATO YOUICHI
分类号 C01B33/02;C23C14/14;G03G5/08;G03G5/082;H01L21/205;H01L31/0248;H01L31/08;H01L31/09 主分类号 C01B33/02
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