| 摘要 |
PURPOSE:To permit higher speed sputtering of ferromagnetic materials by providing covers for magnetic poles of the same material as that of a target on the magnetic pole parts appearing on the front surface of the target and interposing metallic blocks having good heat conductivity between the covers and a base plate in tight contact therewith. CONSTITUTION:An annular magnet 2, a columnar magnet 3 and a target 4 consisting of a ferromagnetic material are mounted on a stainless steel base plate 1 having magnetism. Further, an annular copper block 5, a columnar copper block 6 and a copper block 7 are provided on the plate 1 respectively in tight contact with the magnets 2,3. Covers 8, 9 for magnetic poles of the same or resembling material as or to that of the target 4 are provided respectively on the magnets 2,3 and the blocks 5, 6, 7. The tight contact with the covers 8, 9 and the blocks 5, 6, 7 as well as the blocks 5, 6, 7 and the plate 1 are improved. The plate 1 is made coolable using water. Then the temp. elevation of the covers 8, 9 and the magnets 2, 3 during sputtering is suppressed and the high speed sputtering of the ferromagnetic material is made possible. |
