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发明名称
ELECTRON BEAM ALIGNMENT
摘要
申请公布号
GB2109539(A)
申请公布日期
1983.06.02
申请号
GB19810032928
申请日期
1981.11.02
申请人
* PHILIPS ELECTRONIC AND ASSOCIATED INDUSTRIES LIMITED
发明人
HEWSON NICHOLAS GRAHAM * KING;JAMES PATRICK * BEASLEY
分类号
H01L21/027;H01J37/304;(IPC1-7):G01B15/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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