Field-emission-type ion source.

摘要

The field-emission-type ion source comprises an emitter tip (2), a heater (1), a reservoir (3) which stores material to be ionized, an extracting electrode (6) situated at the front end of the emitter tip, and a coating-layer (4) which is refractory and anti-reactive with the material to be ionized and which is coated on at least the heater of the emitter tip and heater, in order to prevent their reactions with the material to be ionized.