| 摘要 |
PURPOSE:To perform easily the replacement of the wafers by a method wherein at the auxiliary carrier for replacement arranged with metal plates of three sheets, the metal plates on both edges have rotatable structure, and rectangular Teflon members are provided on the central metal plate. CONSTITUTION:Structure of the auxiliary carrier is constituted by arranging the metal plates of three sheets, and the metal plates 1 on both the sides are enabled respectively to perform rotational movement centering the junction face a-a' between the central metal plate 2. The central metal plate 2 is positioned at the bottom part of the auxiliary carrier, and is provided with the rectangular Teflon lumbers of two pieces. Length of the rectangular lumbers coincides with length of a carrier 6 for exclusive use, and the interval between the two rectangular lumbers is the interval enabled to interpose exactly a central round bar of the carrier 6 for exclusive use. The metal plates 1 positioned on both the side parts have vinyl chloride plates 4 provided with grooves of the same pitch with the carrier 6 for exclusive use. The metal plates 1 positioned on the side parts are accompanied with L-shaped metal bars 5, and are made to coincide mutually at the center of the metal plates of two sheets when the metal plates 1 on both sides are made to stand vertically. |
