| 摘要 |
PURPOSE:To flow uniform discharge currents through a plurality of electrodes, and to improve and stabilize the output of laser beams by improving the electrode structure of a gas laser discharge tube. CONSTITUTION:The gas laser generator 1 consists of a discharge tube proper 3 and both end sections 4, 5, has the discharge tube 2 with a reflector 15 and an output mirror 11, a supply port 6 and an outflow port 7 connected to a piping 8 and an anode 12 and cathodes 20, 21 arranged into the discharge tube 2, glow- discharges among the electrodes, brings a gas medium 10 to a population inversion state and generates laser beams 35. The cathodes are composed of the inside cathode 20 disposed at the side inner than the supply port 6 side and the outside cathode 21 arranged at the supply port 6 side. Hollow holes 24 are formed into the inside cathode 20 and the outside cathode 21, and a through- hole 25 is shaped to the outer circumference of the hollow hole 24 of the outside cathode 21. Accordingly, the glow discharge 31B of the outside cathode 21 intrudes into the glow discharge 31A of the inside cathode 20 in glow discharge 31, and current density in the discharge tube 2 is equalized. |
