| 摘要 |
PURPOSE:To enhance the stability of a resonator, by shielding a mirror position adjusting mechanism, from atmosphere and providing said mechanism in a container of a system having laser gas in the opetical resonator, thereby preventing the fluctuation of mirror surfaces. CONSTITUTION:The mirror position adjusting mechanism is built in the inside of a main body flange 101 and a main body cap 102, and shielded from the atmosphere. When the mirror position adjustment has been finished, the main body cap 102 is attached, the air inside the optical resonator is exhausted, the laser gas having a specified pressure is supplied, and the laser oscillation is performed. The pressure difference hardly occurs on both surfaces of the mirror from the time the mirror position adjustment was finished and to the time of the laser oscillation. Therefore, the surfaces of the mirror are not fluctuated, and are not misaligned from the time the adjustment was finished. |
