| 摘要 |
PURPOSE:To prevent the damage of the wafer by mounting a cam mechanism at a delivery terminal between a carrying path at the feeding side and a carrying path at the receiving side and forcedly detaching the wafer adhering on the carrying paths. CONSTITUTION:Cams 7 with projecting edges 7a, which push up the wafer 5 on the carrying path at the feeding side, receive it and move it to the carrying path at the receiving side, are set up to a pulley shaft 1a supporting the pulleys 1 of belts 2 forming the carrying path at the feeding side and the pulleys 3 of belts 4 shaping the carrying path at the receiving side in coaxial form. The cams 7 are integrally fitted to the flange sections of the pulleys 3. The pulleys 1, 1 are mounted to the pulley shaft 1a at a regular interval, the belts 2, 2 are hung and horizontally stretched, and the belts 4, 4 are hung to the pulleys 3, 3 supported to the pulley shaft 1a and horizontally stretched. The wafer 5 is horizontally supported onto the belts 2, 2 at the feeding side, shifted onto the belts 4, 4 at the receiving side at the wafer delivery terminals of both carrying paths, and carried by means of the carrying path at the receiving side up to the destination. |
