发明名称 ADJUSTING METHOD FOR ASSEMBLY OF BONDING HEAD
摘要 PURPOSE:To execute work rapidly and easily by placing the bonding head onto a turning table and adjusting the lower limit of a bonding arm and the verticality of a tool by using a height aligning jig and a verticality aligning jig. CONSTITUTION:The position of the lower limit of the bonding arm 12 is adjusted by rotating the turning table 8 and locating the lower limit in front of an operator, and the height aligning jig 20 is set under a state that the bonding arm 12 is elevated. The bonding arm 12 is dropped in the vertical direction, stopped when the lower surface is contacted with the upper surface of the height aligning jig 20, and made correspond to a lower limit detecting section 14b and the position of a lower limit detector 16 is aligned, and the bonding arm is fixed to the bonding head 10. The position of the upper limit of the bonding arm 12 is similarly adjusted in such a manner that the bonding arm is made correspond to an upper limit detecting section 14a, the position of an upper limit detector 15 is aligned, and the bonding arm is fastened to the bonding head 10. The turning table 8 is rotated in a 90-degree arc, the front of the bonding arm 12 is positioned in front of the operator, the vertical surface of the verticality aligning jig 21 is contacted with the side surface of the tool 11, and the verticality aligning jig 21 is set. The bonding arm 12 is turned in the arrow direction, the side surface of the tool 11 is aligned to the vertical surface, and the bonding arm 12 is fixed to a bonding arm supporting section 12a.
申请公布号 JPS5889834(A) 申请公布日期 1983.05.28
申请号 JP19810188627 申请日期 1981.11.25
申请人 SHINKAWA:KK 发明人 ENOMOTO YOUJI
分类号 H01L21/60 主分类号 H01L21/60
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