| 摘要 |
PURPOSE:To prevent decomposed particle product from mixing into an exhaust system by a method wherein a device to prevent the decomposed particle product from mixing near material gas exhaust port in a deposition chamber is provided. CONSTITUTION:A device preventing the production of decomposed particle product is provided with a baffle board resistible to over 100 deg.C heating at the exhaust port and the material gas for deposition film is introduced into a deposition chamber 4 supported by a supporting structure 5 to input high frequency power into induction coil 6 from a high frequency power supply 7 effecting glow discharge and forming deposited film on a substrate 1 heater at around 300 deg.C by means of a heater 2 supported by a fixing element 3. A pirani gauge, coarse evacuation valve and main evacuation valve are respectively represented by 9, 10 and 11. The deposited film may be produced for a long time making use of this deposited film producing device to make an experiment on the effect in preventing production of the decomposed particle product providing that the decomposed particle product will be hardly accumulated on a device related to the exhaust system connected to said main evacuation valve 8 since said particle product may be accumulated on the baffle board only. |
