| 摘要 |
PURPOSE:To improve the wear resistance of the rubbing surface of a tape, by forming a part or the whole of an insulated layer with an SiC thin film for a thin film magnetic head which contains plural insulated layers, a magnetic matter layer and a conductor layer formed on a magnetic substrate. CONSTITUTION:An insulated layer 32 is formed on a magnetic substrate 31 with use of a target of SiC and by a high frequency sputtering process. A conductor layer 33, a magnetic layer 34, a conductor layer 35, an insulated layer 36 of SiC, an adhesive layer 37 and a protecting substrate 38 are formed on the layer 32. Thus a thin film magnetic head is obtained. For the tape rubbing surface of this magnetic head, the ratio of reaches about 70% for the layer 32 and 36 between the substrates 31 and 38. The conventional SiO2 is partially or totally replaced with SiC. As a result, the wear resistance is greatly improved. Thus the heat stress produced on the tape rubbing surface is reduced. This eliminates the distortion of a mgentic matter of the thin film magnetic matter. |
