| 摘要 |
The invention relates to a leak indicator with a mass spectrometer and an at least two-stage oil diffusion pump. To widen the leak rate measurement range to include relatively high leakage rates, the invention provides an intermediate inlet (2) at the diffusion pump (1), leading via a shut-off valve (3) to the measuring connection (10). When this connection is in operation, only a small partial flow of the total leakage flow is indicated in the mass spectrometer (1). <IMAGE>
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