| 摘要 |
PURPOSE:To securely set the constituent amount of a thin film to a desired value, in forming the thin film, by controlling the flow amount of a modifying gas to be introduced into a container independent of the internal pressure of the container. CONSTITUTION:In forming a thin film of amorphous silicon, a discharge tube 13 for carrying out the activation or the ionization of a modifying gas such as hydrogen and a flow control apparatus 14 for controlling the supply amount of the modifying gas are assembled in a modifying gas introducing pipe 12 connected to a ball jar 1. By this construction, because the amount of an activated or an ionized gas introduced into the bell jar 1 is kept constant always independent of the internal pressure therein, a constituent amount deposited on a base plate 3 can be stabilized. |
