| 摘要 |
PURPOSE:To enable a desired analysis to be performed by providing at least two ion guns, and appropriately irradiating ion beams constantly discharged from the two guns alternately upon a smaple so as to make secondary ions to be easily produced alternately in the forms of atomic ions and molecular ions accurately. CONSTITUTION:Secondary ions containing a large proportion of atomic ions and secondary ions containing a large proportion of molecular ions, after being discharged from the surface of a sample 2, alternately enter a mass-analyzing part 6. When a high-speed ion beam 3 discharged from one ion gun 1 irradiates the surface of the sample 2, secondary ions in the form of atomic ions develop from the surface layer of the sample 2. Thus produced secondary ions enter the mass-analyzing part 6, in which they are subjected to mass spectrometry immediately. After that, the data of the mass spectrometry are analyzed in a data analyzer. |
