| 摘要 |
PURPOSE:To prevent misconception of a lot, and to enable to perform first-in first-out system of the wafers by a method wherein detected parts are provided respectively at the positions corresponding to carrier mounting parts, while a detected part for positioning is provided at another part, and they are detected to control rotation and stopping. CONSTITUTION:A disk 5 provided concentrically with a turntable 1 has light slits 6a-6d as the detected parts at the positons corresponding to the carrier mounting parts 2a-2d on the circumference thereof, and one slit out of the slits, the slit 6b for example, is made as the reference detected part (the reference light slit). Detecting means 8a, 8b of two groups are consisting of light emitters 9a, 9b and photo detectors 10a, 10b. A carrier 12a in the previous process is grasped by a carrier transferring device 11, and carriers 12b-12d are equipped on the carrier mounting parts 2b-2d. The turntable 1 is rotated in a high speed, and after the semiconductor wafers are dried, the rotation of the turntable 1 is stopped at the position where the photo detector 10a has detected the reference light slit 6b. |
