| 摘要 |
PURPOSE:To increase the accuracy and efficiency of the testing of the semiconductor integrated circuit by a method wherein a device for testing of the ON resistor of an analogue input gate circuit is provided. CONSTITUTION:An electronic switch 5, to be used to selectively earth the output terminal of the analogue input gate circuit 1, is provided. This electronic switch 5 is composed, for example of an EMOS, and the gate terminal 5A of the above is connected to the control line of a general purpose tester 6 shown by one-dot broken line in the diagram. When the ON resistors of the analogue input gates G1-Gn are tested respectively, the control signal for measurement of the analogue input gate ON resistor is outputted from the tester 6. This control signal is inputted to the gate of said electronic switch, and the output terminal of the analogue input gate circuit 1 is earthed by giving ON position to the electronic switch 5. As a result, the analogue input gate circuit 1 is put into the state of operation. Then, ON position is successively given to the analogue input gates G1-Gn, and the resistance value of the analogue input gates G1-Gn at that time is measured. Also, when a comparator 2 and a counter 3 are tested, the control signal from the tester is turned to OFF, and testing is performed by selecting one of the normal analogue input gates G1-Gn giving ON position thereon. |
