| 摘要 |
PURPOSE:To perform a rapid and reliable measurement of a surface of an object to be measured, by using a laser light source and an electronic scanning type image sensor. CONSTITUTION:Light 12 from a laser light source 11 is rectilinearly projected on an object M to be measured by a cylindrical lens 13. Light 12 reflected by the object M enters a CCD camera 15, and a scanning is electronically carried out at the inside of the camera 15 to obtain an electric output. A drawing (a) shows the surface condition of the object M, and a drawing (b) shows an output waveform. As shown, a pulse having a large peak value is obtained as an output. An electrical scanning can be conducted, whereby a scanning speed is very fast, and the surface of the object to be measured which is running can be totally scanned by a beltlike laser light. Additionally, the CCD camera is used in this case, but the other means such as an image sensor of an MOS may also be used. The point is that any device will do so long as it is an electronic scanning type image sensor. |
