| 摘要 |
PURPOSE:To increase a photoelectric converting output, by fabricating each electrode part of a photoelectric multiplier type one-dimensional image photoelectric converting element to the strip-like form, and providing an optical system expanding in the orthogonal direction against the reflection one-dimensional image direction from an object to be measured. CONSTITUTION:A flat light beam 11 is irradiated from a perforated mirror 3, and a reflected ray 26 from the surface of an object to be measured is expanded in the orthogonal directon against the one-dimensional image direction by a light beam one-dimensional expander and forms an image on a photoelectric film 23 of an MCP built-in multi-anode photoelectric multiplier 22. An electron emitted from the photoelectric film 23 is multiplied by an MCP24, and from each electrode of a multi-anode 25, an electric output of one-dimensional image is fetched. In this case, each electrode of the multi-anode 25 is extended in the vertical direction against the one-dimensional image, therefore, a current which has totaled a lot of channel outputs can be picked up. |
