发明名称 Clutch assembly for removing a severed wafer from an ingot.
摘要 <p>The wafering system employs a chuck assembly for moving a severed wafer from a crystal through the aperture In the cutting blade to a take-off conveyor. The chuck assembly includes a suction head which is pivotally mounted via a pivot arm assembly, a slide for moving the head back and forth and a carriage for vertically moving the head up and down. A motor is used to actuate the carriage while air cylinders are used to actuate the slide and pivot arm assembly.</p>
申请公布号 EP0079744(A2) 申请公布日期 1983.05.25
申请号 EP19820305945 申请日期 1982.11.09
申请人 SILICON TECHNOLOGY CORPORATION 发明人 STEERE, ROBERT E.
分类号 B28D1/22;B23Q7/04;B28D5/00;B28D5/02;H01L21/304;H01L21/683;(IPC1-7):28D5/00 主分类号 B28D1/22
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