发明名称 |
Clutch assembly for removing a severed wafer from an ingot. |
摘要 |
<p>The wafering system employs a chuck assembly for moving a severed wafer from a crystal through the aperture In the cutting blade to a take-off conveyor. The chuck assembly includes a suction head which is pivotally mounted via a pivot arm assembly, a slide for moving the head back and forth and a carriage for vertically moving the head up and down. A motor is used to actuate the carriage while air cylinders are used to actuate the slide and pivot arm assembly.</p> |
申请公布号 |
EP0079744(A2) |
申请公布日期 |
1983.05.25 |
申请号 |
EP19820305945 |
申请日期 |
1982.11.09 |
申请人 |
SILICON TECHNOLOGY CORPORATION |
发明人 |
STEERE, ROBERT E. |
分类号 |
B28D1/22;B23Q7/04;B28D5/00;B28D5/02;H01L21/304;H01L21/683;(IPC1-7):28D5/00 |
主分类号 |
B28D1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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