| 摘要 |
<p>PURPOSE:To obtain a high-performance, excellently durable, and inexpensive thermal head capable of giving high-quality printings by a method in which the heating section to be touched by a heat-sensitive paper is shaped into a flat or convexed form so as to raise its heat conductivity. CONSTITUTION:For example, a tantalum nitride film is formed on the surface of a partl- grazed alumina base plate by sputtering, and then Cr and Cu are alternately deposited in the order of Cr-Cu-Cr on the tantalum nitride film. Then, a heating resistor and an electrode pattern are formed by a photo-etching method, an SiO2 layer as an antioxidant layer 2 and a Ta2O5 layer as a wear-resistant layer 1 are formed by sputtering, and then a photo resisto 6 is covered only on the heating section over them by a photo-etching method. Then, the Ta2O5 layer 1 is plasma-etched by a plasma etcher and the photo registo is peeled off to obtain an objective thermal head.</p> |
