| 摘要 |
PURPOSE:To correspond to the multi-kind small-quantity production of semiconductor devices by simultaneously disposing and manufacturing two ICs of different functions from each other in the same semiconductor substrate. CONSTITUTION:A semiconductor substrate 4' includes ICs 5, 5' of different types, has type display marks 3, 3' (two-figure arithmetic numerals), and the ICs 5, 5' are alternately arranged. According to this method, chips of two types are produced from one lot of diffusing step, and an apparatus which is arranged to process in a lot unit adapted for a mass production can also avoid the manufacture of chips more than required quantity as much as possible and can prevent the deterioration of the production efficiency. Even if the number of types are further increased, it is effective. |
