| 摘要 |
PURPOSE:To enable to absolutely position a chip by storing a base moving distance from the position of the initial wafer at the time of finishing the manual adjustment of a rotating angle to the positioning pattern and a positioning pattern and then positioning the following wafers at the same position with stored information. CONSTITUTION:A scribing line is first detected in the prescribed sequence and the adjustment of the angle in a horizontal plane is finished. Then a specimen base is manually operated from this position, a positioning special chip is moved into the visual field of an image pickup device fixed in space, and the moving distance and the positioning pattern MK in the specific chip are stored. When the manual operation is finished for the initial wafer, the base is moved based on the relative information between the chips from the second wafer and is positioned at the same position (the specific chip is detected). Accordingly, a probe is effectively automatically positioned at the desired chip, and various measurements can be performed. |
