METHOD OF DETERMING FLUORINE

摘要

7 PHN 9638 A method of determining the concentration of fluorine in a gas flow, in which the gas flow is passed. through a space in which fluorine atoms are formed and after leaving the space the formed fluorine atoms in the gas flow are reacted with a substance while emitting luminescent radiation and the intensity of said radiation is measured, characterized in that elementary silicon is chosen as a material and is provided so as to be optic ally separated from the space.