LIGHT EMITTING DIODE AND METHOD OF MAKING THE SAME

摘要

A light-emitting diode having a semiconductor active layer, a semiconductor first clad layer formed on a surface the semiconductor active layer, and a protrusion formed unitarily on a surface of the first clad layer, thereby to complete an input end of a light guide for light coupling therewith. A method of manufacturing this light emitting diode comprising the steps of forming a recess on one face of a semiconductor substrate, forming a semiconductor first clad layer on the abovementioned face of the semiconductor substrate, and selectively etching the substrate from the other face thereof so as to form a through-hole reaching the recess on the one face of the semiconductor substrate, thereby to expose at least a protrusion of the semiconductor first clad layer formed in the recess.