| 摘要 |
PURPOSE:To facilitate the adjustment of the quantity of irradiated light to make this quantity uniform easily, by using shape variable elements, which are distorted by voltage application, to deform a light quantity correcting plate. CONSTITUTION:A light quantity adjusting plate 17 consists of 5 bimorph elements (17b-1)-(17b-5) of shape variable elements, which are supported on an element supporting part 17a at equal intervals and are constituted with two adhered plane plates consisting of a barium titanate respectively, and shielding plate 17c which is adhered to these elements 17b and is flexible, and a power source 22 is connected to bimorph elements 17b through gain switching amplifiers 21a-21b controlled by a controller 20, and voltages different in polarity are applied to two plane plates consisting of a barium titanate. In accordance with applied voltage, elements (17b-1)-(17b-5) are distorted, and the shielding plate 17c adhered to them is distorted also. |
