| 摘要 |
PURPOSE:To obtain a solar battery having high reliability in the steps and high efficiency by not etching directly a film when forming an electrode with conductor, removing in advance a resist pattern of punched substantially in electrode shape at the lower part, thereby lifting off the unnecessary part to allow only the electrode to remain. CONSTITUTION:Phosphorus is deposited with POCl3 as a source by mixture carrier gas of nitrogen and oxygen in a diffusion furnace after cleaning, thereby forming an n<+> type layer. Then, a surface oxidized layer is removed with aqueous fluoric acid solution, and a diffused layer of back surface is removed with mixed acid. A back surface electrode 22 is formed by printing aluminum paste, baking, further printing silver paste and then baking. An oxidized titanium film is formed by an electron beam deposition method with the full surface side as a reflection preventive film 23. After positive rsist 24 is then spin-coated, ultrafine electrode pattern of minimum line width of 10mum is exposed, developed, and resist is formed substantially in lattice electrode state, and the oxidizied titanium film is removed with fluoric acid. Subsequently, the conductive film 25 is formed by vacuum deposition method. Then, the resist is removed, and the titanium and palladium lattice electrode pattern laminated on the titanium are formed. |
